AlN Substrates

 

 

 

Technical factors of Aluminum Nitride (AlN) Substrate products

 

 

 

Item

Fine

Excellent (edge grind)

dimension

Lengt h ≦ 300, width ≦ 120,

Thickness0.20~1.20

Length tolerance

Thickness 0.63

+ 0.15

-0.05

+0.10

-0.05

0.6 3 < Thickness 0.76

+0.20

-0.05

0.76 < Thickness 1.0

+ 0.15

-0.05

Thicknes s tolerance

±  7%, and NL T ± 0.05

Scribing to scribing tolerance

± 0.05

Minimum scribing width

0.10

Hole dimension

Minimum diameter of round hole is 0.02; minimum side length of the other hole is 0.20

Edge-to-scribed line(the middle of hole)tolerance

Thickness¡ 0.63

+ 0.15

-0.05

± 0.05

0.6 3 < Thickness 0.76

+ 0.20

-0.05

± 0.05

0.76 < Thickness 1.0

+ 0.25

-0.05

± 0.08

Holes tolerance

Φ 0.2~2.0

± 0.05

± 0.05

Φ 2.0~10.0

± 0.10

± 0.10

Φ 10.0 or more 

± 0.8%

± 0.8%

Center-to-center distance of Holes tolerance

± 0.05

± 0.05

Minimum distance of hole-to-hole and hole-to-edge

≧ 1.2times thickness of the substrate,and NLT 1.0m m

Difference between entry diameter and exit diameter of a hole

8%thickness of the substrate

Camber

0.05/25.4(long side),NLT 0.05m m

Parallel degree/vertical degree

0.2% of the longest side

 

 

 

 

 

 

Technical factors of Aluminum Nitride Subtracts

 

 

Property content

Property index

Density (kg/m 3 )

≧ 3.26

Water absorption(%)

0

Linear expansion coefficient [RT -50 0 oC  ](10 -6 mm / oC )

4.4

Bulk resistivity ( Ω cm )

≧ 10 14

Dielectric constant[ 1M H z ]

9

Dissipation factor[ 1M H z ]

3 ≧ 10 -4

Dielectric strength (KV/mm)

15

Flexural strength (MPa)

≧ 330

Thermal conductivity[ 20 oC ] (W/ m - k )

≧ 170

Surface finish Ra( μ m)

0.25~0.5

Camber (~/25 )

0.05

color

Nattierblue

Appearance

Density